Invention Grant
US08716091B2 Structure for self-aligned silicide contacts to an upside-down FET by epitaxial source and drain 有权
通过外延源极和漏极将自对准硅化物接触到倒立型FET的结构

Structure for self-aligned silicide contacts to an upside-down FET by epitaxial source and drain
Abstract:
A method for fabricating an upside-down p-FET includes: fully etching source and drain regions in a donor substrate by etching a silicon-on-insulator layer through buried oxide and partially etching the silicon substrate; refilling a bottom and sidewall surfaces of the etched source and drain regions with epitaxial silicide/germanide to form e-SiGe source and drain regions; capping the source and drain regions with self-aligning silicide/germanide; providing a silicide layer formed over the gate conductor line; providing a first stress liner over the gate and the e-SiGe source and drain regions; depositing a planarized dielectric over the self-aligning silicide/germanide; inverting the donor substrate; bonding the donor substrate to a host wafer; and selectively exposing the buried oxide and the e-SiGe source and drain regions by removing the donor wafer.
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