Invention Grant
US08716091B2 Structure for self-aligned silicide contacts to an upside-down FET by epitaxial source and drain
有权
通过外延源极和漏极将自对准硅化物接触到倒立型FET的结构
- Patent Title: Structure for self-aligned silicide contacts to an upside-down FET by epitaxial source and drain
- Patent Title (中): 通过外延源极和漏极将自对准硅化物接触到倒立型FET的结构
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Application No.: US12750342Application Date: 2010-03-30
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Publication No.: US08716091B2Publication Date: 2014-05-06
- Inventor: Guy Cohen , David James Frank , Isaac Lauer
- Applicant: Guy Cohen , David James Frank , Isaac Lauer
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Michael J. Buchenhorner; Vazken Alexanian
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method for fabricating an upside-down p-FET includes: fully etching source and drain regions in a donor substrate by etching a silicon-on-insulator layer through buried oxide and partially etching the silicon substrate; refilling a bottom and sidewall surfaces of the etched source and drain regions with epitaxial silicide/germanide to form e-SiGe source and drain regions; capping the source and drain regions with self-aligning silicide/germanide; providing a silicide layer formed over the gate conductor line; providing a first stress liner over the gate and the e-SiGe source and drain regions; depositing a planarized dielectric over the self-aligning silicide/germanide; inverting the donor substrate; bonding the donor substrate to a host wafer; and selectively exposing the buried oxide and the e-SiGe source and drain regions by removing the donor wafer.
Public/Granted literature
- US20110241073A1 STRUCTURE FOR SELF-ALIGNED SILICIDE CONTACTS TO AN UPSIDE-DOWN FET BY EPITAXIAL SOURCE AND DRAIN Public/Granted day:2011-10-06
Information query
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