Invention Grant
- Patent Title: Methods of forming transistor gates
- Patent Title (中): 形成晶体管栅极的方法
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Application No.: US13605848Application Date: 2012-09-06
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Publication No.: US08716119B2Publication Date: 2014-05-06
- Inventor: Yongjun Jeff Hu
- Applicant: Yongjun Jeff Hu
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John, P.S.
- Main IPC: H01L21/3205
- IPC: H01L21/3205 ; H01L21/4763 ; H01L21/28 ; H01L27/115 ; H01L29/423 ; H01L29/66 ; H01L29/792

Abstract:
Some embodiments include methods of forming charge storage transistor gates and standard FET gates in which common processing is utilized for fabrication of at least some portions of the different types of gates. FET and charge storage transistor gate stacks may be formed. The gate stacks may each include a gate material, an insulative material, and a sacrificial material. The sacrificial material is removed from the FET and charge storage transistor gate stacks. The insulative material of the FET gate stacks is etched through. A conductive material is formed over the FET gate stacks and over the charge storage transistor gate stacks. The conductive material physically contacts the gate material of the FET gate stacks, and is separated from the gate material of the charge storage transistor gate stacks by the insulative material remaining in the charge storage transistor gate stacks. Some embodiments include gate structures.
Public/Granted literature
- US20130012013A1 Methods Of Forming Transistor Gates Public/Granted day:2013-01-10
Information query
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