Invention Grant
- Patent Title: Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use
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Application No.: US12253083Application Date: 2008-10-16
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Publication No.: US08716535B2Publication Date: 2014-05-06
- Inventor: Gregory Breyta , Richard Anthony DiPietro , Daniel Joseph Dawson
- Applicant: Gregory Breyta , Richard Anthony DiPietro , Daniel Joseph Dawson
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: CanaanLaw, P.C.
- Agent Karen Canaan
- Main IPC: C07C35/22
- IPC: C07C35/22 ; C07C35/18 ; C07C35/06 ; C07C35/08
Abstract:
The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
Public/Granted literature
- US20090054700A1 Precursors to Fluoroalkanol-Containing Olefin Monomers, and Associated Methods of Synthesis and Use Public/Granted day:2009-02-26
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