Invention Grant
- Patent Title: MEMS switch
- Patent Title (中): MEMS开关
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Application No.: US13306675Application Date: 2011-11-29
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Publication No.: US08716619B2Publication Date: 2014-05-06
- Inventor: Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Klaus Reimann
- Applicant: Martijn Goossens , Hilco Suy , Peter Gerard Steeneken , Klaus Reimann
- Applicant Address: NL Eindhoven
- Assignee: NXP B.V.
- Current Assignee: NXP B.V.
- Current Assignee Address: NL Eindhoven
- Priority: EP10193180 20101130
- Main IPC: H01H13/62
- IPC: H01H13/62

Abstract:
A MEMS switch in which at least first, second and third signal lines are provided over the substrate, which each terminate at a connection region. A lower actuation electrode arrangement is over the substrate. A movable contact electrode is suspended over the connection regions for making or breaking electrical contact between at least two of the three connection regions and an upper actuation electrode provided over the lower actuation electrode. The use of three of more signal lines enables a symmetrical actuation force to be achieved or enables multiple switch functions to be implemented by the single movable electrode, or both.
Public/Granted literature
- US20120305374A1 MEMS SWITCH Public/Granted day:2012-12-06
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