Invention Grant
- Patent Title: Device to load TEM sample holders into a vacuum chamber
- Patent Title (中): 将TEM样品架装入真空室的装置
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Application No.: US13555632Application Date: 2012-07-23
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Publication No.: US08716676B2Publication Date: 2014-05-06
- Inventor: George Safar
- Applicant: George Safar
- Applicant Address: US CA Redwood City
- Assignee: XEI Scientific, Inc.
- Current Assignee: XEI Scientific, Inc.
- Current Assignee Address: US CA Redwood City
- Agent Mark D. Perdue
- Main IPC: G21K5/08
- IPC: G21K5/08 ; G21K5/10 ; F16B7/10 ; F16B7/20 ; F16B7/18

Abstract:
A device is described that allows for the insertion and removal of a Transmission Electron Microscope (TEM) specimen stage and insertion rod into and out of a vacuum chamber. The device can be configured to accommodate specimen stage and insertion rods manufactured by all TEM producers. The device has a side-entry slot for accepting the cylindrical stage rod and a locking mechanism, such that unwanted contact with the specimen and the specimen stage itself is avoided during entry and exit from the plasma vacuum chamber. The devices hold said specimen stage and insertion rod in position during the process of plasma cleaning in a vacuum chamber.
Public/Granted literature
- US20130032732A1 DEVICE TO LOAD TEM SAMPLE HOLDERS INTO A VACUUM CHAMBER Public/Granted day:2013-02-07
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