Invention Grant
- Patent Title: Magnetoresistive element and method of manufacturing the same
- Patent Title (中): 磁阻元件及其制造方法
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Application No.: US13428465Application Date: 2012-03-23
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Publication No.: US08716818B2Publication Date: 2014-05-06
- Inventor: Masatoshi Yoshikawa , Satoshi Seto , Hideaki Harakawa , Jyunichi Ozeki , Tatsuya Kishi , Keiji Hosotani
- Applicant: Masatoshi Yoshikawa , Satoshi Seto , Hideaki Harakawa , Jyunichi Ozeki , Tatsuya Kishi , Keiji Hosotani
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-147464 20110701
- Main IPC: H01L29/82
- IPC: H01L29/82 ; G11C11/02

Abstract:
According to one embodiment, a magnetoresistive element includes a storage layer having a variable and perpendicular magnetization, a tunnel barrier layer on the storage layer, a reference layer having an invariable and perpendicular magnetization on the tunnel barrier layer, a hard mask layer on the reference layer, and a sidewall spacer layer on sidewalls of the reference layer and the hard mask layer. An in-plane size of the reference layer is smaller than an in-plane size of the storage layer. A difference between the in-plane sizes of the storage layer and the reference layer is 2 nm or less. The sidewall spacer layer includes a material selected from a group of a diamond, DLC, BN, SiC, B4C, Al2O3 and AlN.
Public/Granted literature
- US20130001652A1 MAGNETORESISTIVE ELEMENT AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2013-01-03
Information query
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