Invention Grant
US08716823B2 Backside image sensor pixel with silicon microlenses and metal reflector
有权
具有硅微透镜和金属反射镜的背面图像传感器像素
- Patent Title: Backside image sensor pixel with silicon microlenses and metal reflector
- Patent Title (中): 具有硅微透镜和金属反射镜的背面图像传感器像素
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Application No.: US13481589Application Date: 2012-05-25
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Publication No.: US08716823B2Publication Date: 2014-05-06
- Inventor: Victor Lenchenkov
- Applicant: Victor Lenchenkov
- Applicant Address: KY George Town
- Assignee: Aptina Imaging Corporation
- Current Assignee: Aptina Imaging Corporation
- Current Assignee Address: KY George Town
- Agency: Treyz Law Group
- Agent Jason Tsai
- Main IPC: H01L31/0232
- IPC: H01L31/0232

Abstract:
A backside illumination (BSI) image sensor pixel that includes microlenses with elevated refractive indices is provided. The image sensor pixel may include a photodiode formed in a silicon substrate, a first microlens formed in a back surface of the substrate, a second microlens formed over a front surface of the substrate, a dielectric stack formed on the front surface of the substrate, and a reflective structure formed in the dielectric stack above the second microlens. The first microlens may be fabricated by forming shallow trench isolation structures in the back surface. The second microlens may be fabricated by depositing polysilicon on the front substrate of the substrate. The first microlens may serve to concentrate light towards the photodiode, whereas the second microlens may serve to collimate light that traverses through the substrate so that light exiting the second microlens will reflect off the reflective structure and back into the photodiode.
Public/Granted literature
- US20130134535A1 BACKSIDE IMAGE SENSOR PIXEL WITH SILICON MICROLENSES AND METAL REFLECTOR Public/Granted day:2013-05-30
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