Invention Grant
US08717055B2 Probe devices formed from multiple planar layers of structural material with tip regions formed from one or more intermediate planar layers 有权
由具有由一个或多个中间平面层形成的尖端区域的多个结构材料平面层形成的探针装置

Probe devices formed from multiple planar layers of structural material with tip regions formed from one or more intermediate planar layers
Abstract:
Embodiments disclosed herein are directed to compliant probe structures for making temporary or permanent contact with electronic circuits and the like. In particular, embodiments are directed to various designs of cantilever-like probe structures. Some embodiments are directed to methods for fabricating such cantilever structures. In some embodiments, methods are used to form probe structures from a plurality of planar multi-material layers wherein the probe structures include a contact tip and a compliant body with the compliant body formed from at least one material that is different from the tip material and wherein compliant body provides for elastic compression of the probe in a plane of primary motion during use and wherein during formation a stacking direction of the plurality of layers is perpendicular to the plane of primary motion.
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