Invention Grant
US08717538B2 Catoptric imaging optical system with an arc-shaped object field
有权
具有弧形对象场的Catoptric成像光学系统
- Patent Title: Catoptric imaging optical system with an arc-shaped object field
- Patent Title (中): 具有弧形对象场的Catoptric成像光学系统
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Application No.: US12767574Application Date: 2010-04-26
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Publication No.: US08717538B2Publication Date: 2014-05-06
- Inventor: Hans-Juergen Mann
- Applicant: Hans-Juergen Mann
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102007051668 20071026
- Main IPC: G03B27/54
- IPC: G03B27/54

Abstract:
In certain aspects, imaging optical systems with a plurality of mirrors image an object field in an object plane into an image field in an image plane. In the light path between non-obscured mirrors, imaging rays pass through at least one multiple pass-through region between spaced-apart planes which are arranged parallel to the object plane and/or parallel to the image plane. The imaging optical systems have at least one pupil plane. The pupil plane is arranged outside the multiple pass-through region between the non-obscured mirrors. This can provide an imaging optical system which provides for an easier correction of image errors.
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