Invention Grant
US08717581B2 Method for determining the position of a structure within an image and position measuring device for carrying out the method 有权
用于确定图像内的结构的位置的方法和用于执行该方法的位置测量装置

  • Patent Title: Method for determining the position of a structure within an image and position measuring device for carrying out the method
  • Patent Title (中): 用于确定图像内的结构的位置的方法和用于执行该方法的位置测量装置
  • Application No.: US13247914
    Application Date: 2011-09-28
  • Publication No.: US08717581B2
    Publication Date: 2014-05-06
  • Inventor: Mario Laengle
  • Applicant: Mario Laengle
  • Applicant Address: DE Jena
  • Assignee: Carl Zeiss SMS GmbH
  • Current Assignee: Carl Zeiss SMS GmbH
  • Current Assignee Address: DE Jena
  • Agency: Fish & Richardson P.C.
  • Priority: DE102010047051 20100929
  • Main IPC: G01B11/14
  • IPC: G01B11/14
Method for determining the position of a structure within an image and position measuring device for carrying out the method
Abstract:
A method is provided for determining the position of a structure within an image relative to a reference point, in which the structure has a center of symmetry, the method comprising: providing an image which comprises the structure and which has a reference point, carrying out at least one symmetry operation of the image with respect to the reference point, by means of which at least one mirror image is obtained which has a mirrored structure congruent relative to the structure, determining at least one displacement vector between a structure and a mirrored structure or two mirrored structures, and calculating the position of the structure as a position of the center of symmetry of the structure relative to the reference point from the at least one displacement vector. Furthermore, a position measuring device is provided for determining the position of a structure within an image relative to a reference point.
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