Invention Grant
US08718456B2 Surface heating device for a substrate treatment device and substrate treatment device
有权
用于基板处理装置和基板处理装置的表面加热装置
- Patent Title: Surface heating device for a substrate treatment device and substrate treatment device
- Patent Title (中): 用于基板处理装置和基板处理装置的表面加热装置
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Application No.: US13119121Application Date: 2010-08-23
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Publication No.: US08718456B2Publication Date: 2014-05-06
- Inventor: Michael Hentschel , Thomas Meyer , Hubertus Von Der Waybrink , Marco Kenne , Daniel Stange , Hans-Christian Hecht
- Applicant: Michael Hentschel , Thomas Meyer , Hubertus Von Der Waybrink , Marco Kenne , Daniel Stange , Hans-Christian Hecht
- Applicant Address: DE Dresden
- Assignee: Von Ardenne Anlagentechnik GmbH
- Current Assignee: Von Ardenne Anlagentechnik GmbH
- Current Assignee Address: DE Dresden
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Agent Victor A. Cardona, Esq.
- Priority: DE102009038341 20090821
- International Application: PCT/EP2010/062264 WO 20100823
- International Announcement: WO2011/020924 WO 20110224
- Main IPC: F26B19/00
- IPC: F26B19/00
Abstract:
A surface heating device for a substrate treatment device with increased power density and improved homogeneity of heat radiation includes a jacket tube heater with straight tube sections and bent tube sections in which straight tube sections are arranged parallel to each other in a main plane and straight tube sections are connected to each other by bent tube sections, so that at least part of the bent tube sections are aligned sloped relative to the main plane.
Public/Granted literature
- US20120281975A1 SURFACE HEATING DEVICE FOR A SUBSTRATE TREATMENT DEVICE AND SUBSTRATE TREATMENT DEVICE Public/Granted day:2012-11-08
Information query
IPC分类:
