Invention Grant
- Patent Title: Comprehensive analysis of queue times in microelectronic manufacturing
- Patent Title (中): 微电子制造队列时间综合分析
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Application No.: US12778457Application Date: 2010-05-12
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Publication No.: US08718809B2Publication Date: 2014-05-06
- Inventor: Robert J. Baseman , Tomasz J. Nowicki
- Applicant: Robert J. Baseman , Tomasz J. Nowicki
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Daniel P. Morris, Esq.
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
A system for determining a group of semiconductor manufacturing process steps with a similar influence on individual semiconductor products. The system generates a first table including time stamps for the individual semiconductor products. The system creates a second table including Q-times based on the first table. The Q-times refers to time differences between every pair of the time stamps. The system forms a dependency table by grouping the Q-times with similar dependencies together. The system identifies groups of the similar dependencies. The system extracts semiconductor process steps belonging to the groups.
Public/Granted literature
- US20110282472A1 COMPREHENSIVE ANALYSIS OF QUEUE TIMES IN MICROELECTRONIC MANUFACTURING Public/Granted day:2011-11-17
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