Invention Grant
- Patent Title: Optimized activation prevention mechanism for a gas delivery system
- Patent Title (中): 优化气体输送系统的激活预防机制
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Application No.: US13338175Application Date: 2011-12-27
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Publication No.: US08720478B2Publication Date: 2014-05-13
- Inventor: Mark Taskar
- Applicant: Mark Taskar
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Main IPC: F16K35/00
- IPC: F16K35/00

Abstract:
A mechanism for implementing at least one of activation and deactivation of a gas valve that is coupled to an input manifold of a processing chamber is provided. The mechanism includes a toggle arm disposed in one of a toggle activation position and a toggle deactivation position. The mechanism also includes a toggle operated switch coupled to the toggle arm and the gas valve. The toggle operated switch is disposed on top of the gas valve and the toggle arm is disposed on top of the toggle operated switch so as to minimize a footprint of an assembly that comprises the gas valve, the toggle operated switch, and the toggle arm. Thus, the process gas flow flows through the gas valve when the toggle arm is in the toggle activation position and is inhibited from flowing into the gas valve when the toggle arm is in the toggle deactivation position.
Public/Granted literature
- US20120153197A1 OPTIMIZED ACTIVATION PREVENTION MECHANISM FOR A GAS DELIVERY SYSTEM Public/Granted day:2012-06-21
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