Invention Grant
US08721295B2 Vacuum pump self-diagnosis method, vacuum pump self-diagnosis system, and vacuum pump central monitoring system
失效
真空泵自诊断方式,真空泵自诊断系统和真空泵中央监控系统
- Patent Title: Vacuum pump self-diagnosis method, vacuum pump self-diagnosis system, and vacuum pump central monitoring system
- Patent Title (中): 真空泵自诊断方式,真空泵自诊断系统和真空泵中央监控系统
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Application No.: US11813716Application Date: 2006-04-07
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Publication No.: US08721295B2Publication Date: 2014-05-13
- Inventor: Tetsuro Sugiura , Keiji Tanaka , Toshiharu Nakazawa , Koichi Kido , Tomoyuki Yamazaki
- Applicant: Tetsuro Sugiura , Keiji Tanaka , Toshiharu Nakazawa , Koichi Kido , Tomoyuki Yamazaki
- Applicant Address: JP Tokyo
- Assignee: Ebara Corporation
- Current Assignee: Ebara Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2005-112373 20050408
- International Application: PCT/JP2006/307878 WO 20060407
- International Announcement: WO2006/109861 WO 20061019
- Main IPC: F04B37/14
- IPC: F04B37/14 ; F04B49/00

Abstract:
There are provided a vacuum pump self-diagnosis method, a vacuum pump self-diagnosis system, a vacuum pump central monitoring system capable of making self-diagnosis of a dry vacuum pump. A vacuum pump self-diagnosis method decides the occurrence of failure and generates an alarm when a predetermined alarm set value is exceeded by an integrated value or an average value of a current of a motor for rotating a rotor of said vacuum pump. In a vacuum pump self-diagnosis system for making self-diagnosis of a vacuum pump which comprises a casing and a rotor rotatably arranged in the casing for sucking and discharging a gas through rotations of the rotor, the rotor comprises a plurality of stages and a pressure sensor is provided between the rotor stages. A self-diagnosis unit is provided for calculating an integrated value or an average value of a current of a motor for rotating said rotor, and making self-diagnosis of the vacuum pump when the integrated value or average value exceeds a predetermined alarm set value. The self-diagnosis unit switches from one self-diagnosis calculation method to another or interrupts the self-diagnosis calculation based on a pressure value detected by said pressure sensor.
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