Invention Grant
US08721394B2 Polishing pad and polishing method 有权
抛光垫和抛光方法

Polishing pad and polishing method
Abstract:
A polishing pad and a polishing method for polishing a substrate are described. The polishing pad includes a polishing layer and at least two grooves. The grooves form polishing tracks respectively. The polishing tracks collectively construct an even tracking zone. A better polishing uniformity of a substrate surface is achieved with the even tracking zone.
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