Invention Grant
- Patent Title: Polishing pad and polishing method
- Patent Title (中): 抛光垫和抛光方法
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Application No.: US11960451Application Date: 2007-12-19
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Publication No.: US08721394B2Publication Date: 2014-05-13
- Inventor: Yu-Piao Wang
- Applicant: Yu-Piao Wang
- Applicant Address: TW Taiching
- Assignee: IV Technologies Co., Ltd.
- Current Assignee: IV Technologies Co., Ltd.
- Current Assignee Address: TW Taiching
- Agency: Ditthavong Mori & Steiner, P.C.
- Priority: TW96139014A 20071018
- Main IPC: B24B1/00
- IPC: B24B1/00 ; B24D11/00

Abstract:
A polishing pad and a polishing method for polishing a substrate are described. The polishing pad includes a polishing layer and at least two grooves. The grooves form polishing tracks respectively. The polishing tracks collectively construct an even tracking zone. A better polishing uniformity of a substrate surface is achieved with the even tracking zone.
Public/Granted literature
- US20090104849A1 POLISHING PAD AND POLISHING METHOD Public/Granted day:2009-04-23
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