Invention Grant
- Patent Title: Method for manufacturing silicon single crystal
- Patent Title (中): 硅单晶的制造方法
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Application No.: US12647659Application Date: 2009-12-28
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Publication No.: US08721787B2Publication Date: 2014-05-13
- Inventor: Yukinaga Azuma , Masaki Morikawa
- Applicant: Yukinaga Azuma , Masaki Morikawa
- Applicant Address: JP Akita
- Assignee: Japan Super Quartz Corporation
- Current Assignee: Japan Super Quartz Corporation
- Current Assignee Address: JP Akita
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2008-335813 20081229
- Main IPC: C30B15/14
- IPC: C30B15/14

Abstract:
A method for manufacturing a silicon single crystal is provided including producing a silicon melt in a chamber by melting a silicon raw material loaded into a silica glass crucible under a reduced pressure and high temperature, removing gas bubbles from within the silicon melt by rapidly changing at least the pressure or temperature within the chamber, and pulling up the silicon single crystal from the silicon melt after the gas bubbles are removed. When the pressure is rapidly changed, the pressure within the chamber is rapidly changed at a predetermined change ratio. In addition, when the temperature is rapidly changed, the temperature within the chamber is rapidly changed at a predetermined change ratio. In this way, Ar gas attached to an inner surface of the crucible and h is the cause of the generation of SiO gas is removed.
Public/Granted literature
- US20100162944A1 METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL Public/Granted day:2010-07-01
Information query
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