Invention Grant
- Patent Title: Homing of arbitrary scan path of a rotating magnetron
- Patent Title (中): 回旋磁控管的任意扫描路径
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Application No.: US13347030Application Date: 2012-01-10
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Publication No.: US08721847B2Publication Date: 2014-05-13
- Inventor: Yu Chang , William Kuang , Ronald D. DeDore , Jitendra R. Bhimjiyani , Wesley W. Zhang
- Applicant: Yu Chang , William Kuang , Ronald D. DeDore , Jitendra R. Bhimjiyani , Wesley W. Zhang
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agent Charles S. Guenzer
- Main IPC: C23C14/35
- IPC: C23C14/35

Abstract:
A control system and method for controlling two motors determining the azimuthal and circumferential position of a magnetron rotating about the central axis of the sputter chamber in back of its target sputtering and capable of a nearly arbitrary scan path, e.g., with a planetary gear mechanism. A system controller periodically sends commands to the motion controller which closely controls the motors. Each command includes a command ticket, which may be one of several values. The motion controller accepts only commands having a command ticket of a different value from the immediately preceding command. One command selects a scan profile stored in the motion controller, which calculates motor signals from the selected profile. Another command instructs a dynamic homing command which interrogates sensors of the position of two rotating arms to determine if the arms in the expected positions. If not, the arms are rehomed.
Public/Granted literature
- US20120103800A1 Homing of arbitrary scan path of a rotating magnetron Public/Granted day:2012-05-03
Information query
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