Invention Grant
US08721918B2 Method for purifying fluoride etching solution by using hydroxide compound and ion exchange resin absorption 有权
通过使用氢氧化物化合物和离子交换树脂吸收来净化氟化物蚀刻溶液的方法

Method for purifying fluoride etching solution by using hydroxide compound and ion exchange resin absorption
Abstract:
A method for purifying fluoride etching solution is provided. The method begins with a reaction by hydroxide gas or solution to achieve a balance pH condition for the fluoride etching solution. Subsequently, the treated etching solution can be fed by constant velocity pump to a basic anion exchange resin column(s). The basic anion exchange resins remove various contaminants resulting in a saleable product to a wide range of industrial applications. The final solution is collected in a finished product storage tank. The degree of purification by basic anion exchange resin can be verified, if needed at all, thereby making ammonium fluoride (AF), ammonium bifluoride (ABF), anhydrous hydrogen fluoride (AHF) and fluoride mixture to meet the application of industries or different market's application. Further, the ion exchange resins can be regenerated as needed to extend the useful life and system capacity.
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