Invention Grant
- Patent Title: Device and method for etching a pattern
- Patent Title (中): 蚀刻图案的装置和方法
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Application No.: US13464260Application Date: 2012-05-04
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Publication No.: US08721955B2Publication Date: 2014-05-13
- Inventor: Miguel Aubouy
- Applicant: Miguel Aubouy
- Applicant Address: FR Paris
- Assignee: Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Current Assignee: Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Current Assignee Address: FR Paris
- Agency: Occhiuti & Rohlicek LLP
- Priority: FR1153831 20110504
- Main IPC: B41C1/05
- IPC: B41C1/05 ; B29C59/16

Abstract:
An apparatus for etching a pattern in an etching zone laid out on a substrate includes a pen that can be freely moved manually relative to the etching zone, the pen being equipped with an etching head able to etch the substrate at an etching point when etching is triggered, a measuring unit for measuring position and orientation of the etching head relative to the substrate, a control unit configured to calculate coordinates of the etching point as a function of the measured position and orientation of the etching head relative to the substrate, to trigger etching at the etching point if the calculated coordinates of the etching point correspond to coordinates of a point to be etched, the coordinates of the point to be etched being encoded in a prerecorded drawing of the pattern, and to automatically prevent etching otherwise.
Public/Granted literature
- US20120280431A1 DEVICE AND METHOD FOR ETCHING A PATTERN Public/Granted day:2012-11-08
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