Invention Grant
- Patent Title: Patterning process
- Patent Title (中): 图案化过程
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Application No.: US13450867Application Date: 2012-04-19
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Publication No.: US08722321B2Publication Date: 2014-05-13
- Inventor: Tomohiro Kobayashi , Takeshi Kinsho , Akihiro Seki , Kentaro Kumaki
- Applicant: Tomohiro Kobayashi , Takeshi Kinsho , Akihiro Seki , Kentaro Kumaki
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2011-096119 20110422
- Main IPC: G03F7/26
- IPC: G03F7/26

Abstract:
A negative pattern is formed by applying a resist composition onto a substrate, baking, exposing to high-energy radiation, baking (PEB), and developing the exposed resist film in an organic solvent developer to selectively dissolve the unexposed region of resist film. The resist composition comprising a hydrogenated ROMP polymer comprising recurring units having an acid labile group-protected carboxyl group and recurring units having a lactone structure displays a high dissolution contrast in organic solvent development, and exhibits high dry etch resistance even when the acid labile group is deprotected through exposure and PEB.
Public/Granted literature
- US20120270159A1 PATTERNING PROCESS Public/Granted day:2012-10-25
Information query
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