Invention Grant
- Patent Title: Method for preparing p-type ZnO-based material
- Patent Title (中): 制备p型ZnO基材料的方法
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Application No.: US13825197Application Date: 2010-09-25
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Publication No.: US08722456B2Publication Date: 2014-05-13
- Inventor: Zhizhen Ye , Yangfan Lu , Kewei Wu , Jingyun Huang , Qikuo Ye
- Applicant: Zhizhen Ye , Yangfan Lu , Kewei Wu , Jingyun Huang , Qikuo Ye
- Applicant Address: CN
- Assignee: Hangzhou Bluelight Opto-Electronic Material Co., Ltd.
- Current Assignee: Hangzhou Bluelight Opto-Electronic Material Co., Ltd.
- Current Assignee Address: CN
- International Application: PCT/CN2010/077253 WO 20100925
- International Announcement: WO2012/037729 WO 20120329
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/16

Abstract:
The embodiments disclosed a method for preparing a p-type ZnO-based material, the method conducted in a metal organic chemical vapor deposition (MOCVD) system, including cleaning a surface of a substrate and placing the substrate in a growth chamber of the metal organic chemical vapor deposition system, vacuumizing the growth chamber to 10−3-10−4 Pa, heating the substrate to 200-700° C., introducing an organic Zn source, an organic Na source and oxygen, and depositing the p-type ZnO-based material on the substrate. Na-doping is capable of greatly improving hole concentration and p-type stability in the ZnO-based material, and use of Na-doping technology in combination with MOCVD equipment provides a p-type ZnO-based material having excellent crystal quality and electrical and optical qualities.
Public/Granted literature
- US20130183797A1 METHOD FOR PREPARING P-TYPE ZnO-BASED MATERIAL Public/Granted day:2013-07-18
Information query
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