Invention Grant
- Patent Title: Method of protecting STI structures from erosion during processing operations
- Patent Title (中): 保护STI结构免受加工作业侵蚀的方法
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Application No.: US13115270Application Date: 2011-05-25
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Publication No.: US08722479B2Publication Date: 2014-05-13
- Inventor: Hans-Juergen Thees , Stephan Kronholz , Joerg Radecker
- Applicant: Hans-Juergen Thees , Stephan Kronholz , Joerg Radecker
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/76
- IPC: H01L21/76

Abstract:
Generally, the present disclosure is directed to a method of at least reducing unwanted erosion of isolation structures of a semiconductor device during fabrication. One illustrative method disclosed includes forming an isolation structure in a semiconducting substrate and forming a conductive protection ring above plurality isolation structure.
Public/Granted literature
- US20120302037A1 Method of Protecting STI Structures From Erosion During Processing Operations Public/Granted day:2012-11-29
Information query
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