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US08722479B2 Method of protecting STI structures from erosion during processing operations 有权
保护STI结构免受加工作业侵蚀的方法

Method of protecting STI structures from erosion during processing operations
Abstract:
Generally, the present disclosure is directed to a method of at least reducing unwanted erosion of isolation structures of a semiconductor device during fabrication. One illustrative method disclosed includes forming an isolation structure in a semiconducting substrate and forming a conductive protection ring above plurality isolation structure.
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