Invention Grant
- Patent Title: Method of fabricating non-volatile memory device
- Patent Title (中): 制造非易失性存储器件的方法
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Application No.: US13831976Application Date: 2013-03-15
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Publication No.: US08722489B2Publication Date: 2014-05-13
- Inventor: Cheng-Yuan Hsu , Chun-Hsiao Li
- Applicant: Powerchip Technology Corporation
- Applicant Address: TW Hsinchu
- Assignee: Powerchip Technology Corporation
- Current Assignee: Powerchip Technology Corporation
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW100113397A 20110418
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A method of fabricating a non-volatile memory is provided. A tunneling dielectric layer and a first patterned conductive layer are sequentially formed on a substrate. A patterned inter-gate dielectric layer and a second patterned conductive layer are stacked on a first surface of the first patterned conductive layer, and a second surface of the first patterned conductive layer is exposed. The second surface is adjacent to the first surface. The substrate is covered by a passivation layer, and a first sidewall of the first patterned conductive layer is exposed. A recess is formed on the first sidewall of the first patterned conductive layer, such that the first sidewall has a sharp corner. A portion of the passivation layer on the second surface is removed, such that the sharp corner of the first patterned conductive layer is exposed.
Public/Granted literature
- US20130203228A1 METHOD OF FABRICATING NON-VOLATILE MEMORY DEVICE Public/Granted day:2013-08-08
Information query
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