Invention Grant
US08722527B2 Integrated circuit manufacturing method and integrated circuit 有权
集成电路制造方法和集成电路

  • Patent Title: Integrated circuit manufacturing method and integrated circuit
  • Patent Title (中): 集成电路制造方法和集成电路
  • Application No.: US12994628
    Application Date: 2009-05-19
  • Publication No.: US08722527B2
    Publication Date: 2014-05-13
  • Inventor: Didem ErnurRomano Hoofman
  • Applicant: Didem ErnurRomano Hoofman
  • Applicant Address: NL Eindhoven
  • Assignee: NXP B.V.
  • Current Assignee: NXP B.V.
  • Current Assignee Address: NL Eindhoven
  • Priority: EP08156980 20080527
  • International Application: PCT/IB2009/052084 WO 20090519
  • International Announcement: WO2009/144618 WO 20091203
  • Main IPC: H01L21/44
  • IPC: H01L21/44
Integrated circuit manufacturing method and integrated circuit
Abstract:
The present invention discloses an integrated circuit (IC) comprising a bond pad (160); a substrate stack carrying a first layer (130) comprising conductive regions (135); and an interconnect layer (140) over the first layer (130) comprising a dielectric material portion (400) between the bond pad (160) and the substrate stack, said portion comprising a plurality of air-filled trenches (345) defining at least one pillar (340) of the dielectric material (400), at least said air-filled trenches (345) being capped by a porous capping layer (440). The interconnect layer (140), which typically is one of the uppermost interconnect layers of the IC, has an improved resilience to pressure exerted on the bond pad (160). The present invention further teaches a method for manufacturing such an IC.
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