Invention Grant
US08722840B2 Resist underlayer film forming composition, and method for forming resist pattern using the same
有权
抗蚀剂下层膜形成组合物,以及使用其形成抗蚀剂图案的方法
- Patent Title: Resist underlayer film forming composition, and method for forming resist pattern using the same
- Patent Title (中): 抗蚀剂下层膜形成组合物,以及使用其形成抗蚀剂图案的方法
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Application No.: US13884132Application Date: 2011-11-11
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Publication No.: US08722840B2Publication Date: 2014-05-13
- Inventor: Rikimaru Sakamoto , Noriaki Fujitani , Takafumi Endo , Ryuji Ohnishi , BangChing Ho
- Applicant: Rikimaru Sakamoto , Noriaki Fujitani , Takafumi Endo , Ryuji Ohnishi , BangChing Ho
- Applicant Address: JP Tokyo
- Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2010-256457 20101117
- International Application: PCT/JP2011/076083 WO 20111111
- International Announcement: WO2012/067040 WO 20120524
- Main IPC: G03F7/11
- IPC: G03F7/11 ; C08L67/04

Abstract:
There is provided a composition for forming a resist underlayer film that has a high selectivity of dry etching rate even though the composition contains an aromatic ring such as a benzene ring, and that is useful in lowering LER that presents a large problem in EUV (wavelength 13.5 nm) lithography. Moreover, another object is to obtain a composition for forming a resist underlayer film that provides a resist pattern having a desired shape on the resist underlayer film. A resist underlayer film forming composition for lithography which includes a polymer and a solvent, wherein in the polymer, diphenyl sulfone or a derivative thereof is introduced in the main chain of the polymer through an ether bond.
Public/Granted literature
- US20130230809A1 RESIST UNDERLAYER FILM FORMING COMPOSITION, AND METHOD FOR FORMING RESIST PATTERN USING THE SAME Public/Granted day:2013-09-05
Information query
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