Invention Grant
US08722840B2 Resist underlayer film forming composition, and method for forming resist pattern using the same 有权
抗蚀剂下层膜形成组合物,以及使用其形成抗蚀剂图案的方法

Resist underlayer film forming composition, and method for forming resist pattern using the same
Abstract:
There is provided a composition for forming a resist underlayer film that has a high selectivity of dry etching rate even though the composition contains an aromatic ring such as a benzene ring, and that is useful in lowering LER that presents a large problem in EUV (wavelength 13.5 nm) lithography. Moreover, another object is to obtain a composition for forming a resist underlayer film that provides a resist pattern having a desired shape on the resist underlayer film. A resist underlayer film forming composition for lithography which includes a polymer and a solvent, wherein in the polymer, diphenyl sulfone or a derivative thereof is introduced in the main chain of the polymer through an ether bond.
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