Invention Grant
- Patent Title: Carbazole novolak resin
- Patent Title (中): 咔唑酚醛清漆树脂
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Application No.: US13377055Application Date: 2010-06-16
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Publication No.: US08722841B2Publication Date: 2014-05-13
- Inventor: Daigo Saito , Hiroaki Okuyama , Hideki Musashi , Tetsuya Shinjo , Keisuke Hashimoto
- Applicant: Daigo Saito , Hiroaki Okuyama , Hideki Musashi , Tetsuya Shinjo , Keisuke Hashimoto
- Applicant Address: JP Tokyo
- Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2009-146289 20090619
- International Application: PCT/JP2010/060223 WO 20100616
- International Announcement: WO2010/147155 WO 20101223
- Main IPC: C08G59/40
- IPC: C08G59/40

Abstract:
There is provided a resist underlayer film having heat resistance that is used for a lithography process in the production of semiconductor devices, and a high refractive index film having transparency that is used for an electronic device. A polymer comprising a unit structure of Formula (1): wherein each of R1, R2, R3, and R5 may be a hydrogen atom, R4 may be phenyl group or naphthyl group. A resist underlayer film forming composition comprising the polymer, and a resist underlayer film formed from the composition. A high refractive index film forming composition comprising the polymer, and a high refractive index film formed from the composition.
Public/Granted literature
- US20120077345A1 CARBAZOLE NOVOLAK RESIN Public/Granted day:2012-03-29
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