Invention Grant
- Patent Title: MEMS switch and communication device using the same
- Patent Title (中): MEMS开关和通讯装置使用相同
-
Application No.: US13265970Application Date: 2010-08-26
-
Publication No.: US08723061B2Publication Date: 2014-05-13
- Inventor: Yasuyuki Naito , Jan Bienstman , Xavier Rottenberg , Hendrikus A. C. Tilmans
- Applicant: Yasuyuki Naito , Jan Bienstman , Xavier Rottenberg , Hendrikus A. C. Tilmans
- Applicant Address: JP Osaka BE Leuven
- Assignee: Panasonic Corporation,IMEC
- Current Assignee: Panasonic Corporation,IMEC
- Current Assignee Address: JP Osaka BE Leuven
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JPP2009-215842 20090917
- International Application: PCT/JP2010/005268 WO 20100826
- International Announcement: WO2011/033728 WO 20110324
- Main IPC: H01H57/00
- IPC: H01H57/00

Abstract:
A MEMS switch in which contact force sufficient to make a contact having low contact resistance is maintained after contact-formation to maintain low contact resistance at the contact where the signal is transmitted in an “on” state. The MEMS switch includes a first electrode, a second electrode opposed to and separated from the first electrode, a third and a fourth electrodes, wherein electrical contact is made between the electrodes by electrostatic force generated between the electrodes, and a bump which can form the contact between the electrodes is provided on an electrode, and a gap is formed between the electrodes when the electrical contact is made between the electrodes.
Public/Granted literature
- US20120055769A1 MEMS SWITCH AND COMMUNICATION DEVICE USING THE SAME Public/Granted day:2012-03-08
Information query