Invention Grant
US08723103B2 Optical encoder readhead configured to block stray light with dummy vias
有权
光学编码器读取头配置为用伪通孔阻挡杂散光
- Patent Title: Optical encoder readhead configured to block stray light with dummy vias
- Patent Title (中): 光学编码器读取头配置为用伪通孔阻挡杂散光
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Application No.: US13291905Application Date: 2011-11-08
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Publication No.: US08723103B2Publication Date: 2014-05-13
- Inventor: Jamie Shaffer
- Applicant: Jamie Shaffer
- Applicant Address: JP Kawasaki-shi
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Christensen O'Connor Johnson Kindness PLLC
- Main IPC: G01D5/26
- IPC: G01D5/26 ; H01J40/00 ; H01J5/02

Abstract:
An optical readhead for measuring a displacement along a measuring axis direction between the readhead and a scale track comprises an illumination portion configured to output source light to the scale track and a monolithic detector configuration. The monolithic detector configuration comprises: a first track photodetector portion configured to receive scale light from the scale track; a first metal layer; a second metal layer; and a plurality of dummy vias between the first metal layer and the second metal layer. The plurality of dummy vias is arranged to block light transmission along a layer between the first and second metal layers, and the plurality of dummy vias is formed by the same process steps used to fabricate a plurality of active vias used to connect circuit elements on the monolithic detector configuration.
Public/Granted literature
- US20130112859A1 OPTICAL ENCODER READHEAD CONFIGURED TO BLOCK STRAY LIGHT Public/Granted day:2013-05-09
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