Invention Grant
- Patent Title: Sequential radial mirror analyser
- Patent Title (中): 顺序径向镜分析仪
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Application No.: US13679181Application Date: 2012-11-16
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Publication No.: US08723114B2Publication Date: 2014-05-13
- Inventor: Anjam Khursheed , Hung Quang Hoang
- Applicant: National University of Singapore
- Applicant Address: SG Singapore
- Assignee: National University of Singapore
- Current Assignee: National University of Singapore
- Current Assignee Address: SG Singapore
- Agency: Innovation Capital Law Group, LLP
- Agent Vic Y. Lin; Joseph G. Chu
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J3/26 ; H01J49/48 ; H01J49/44

Abstract:
A sequential radial mirror analyzer (RMA) (100) for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen (112) is disclosed. The RMA comprises a 0V equipotential exit grid (116), and a plurality of electrodes (119, 120a, 120b, 120c) electrically configured to generate corresponding electrostatic fields for deflecting at least some of the charged particles of a single energy level to exit through the exit grid (116) to form a second-order focal point on a detector (106). The second-order focal point is associated with the single energy level, and the detector (106) is disposed external to the corresponding electrostatic fields. A related method is also disclosed.
Public/Granted literature
- US20130126730A1 SEQUENTIAL RADIAL MIRROR ANALYSER Public/Granted day:2013-05-23
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