Invention Grant
- Patent Title: Switchable multi perspective detector, optics therefor and method of operating thereof
- Patent Title (中): 可切换多透视检测器及其操作方法
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Application No.: US13543593Application Date: 2012-07-06
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Publication No.: US08723117B2Publication Date: 2014-05-13
- Inventor: Stefan Lanio , Gerald Schönecker , Dieter Winkler
- Applicant: Stefan Lanio , Gerald Schönecker , Dieter Winkler
- Applicant Address: DE Heimstetten
- Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Current Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Current Assignee Address: DE Heimstetten
- Agency: Patterson & Sheridan, LLP
- Priority: EP12164317 20120416
- Main IPC: H01J37/26
- IPC: H01J37/26

Abstract:
A secondary charged particle detection device for detection of a signal beam is described. The device includes a detector arrangement having at least two detection elements with active detection areas, wherein the active detection areas are separated by a gap (G), a particle optics configured for separating the signal beam into a first portion of the signal beam and into at least one second portion of the signal beam, and configured for focusing the first portion of the signal beam and the at least one second portion of the signal beam. The particle optics includes an aperture plate and at least a first inner aperture openings in the aperture plate, and at least one second radially outer aperture opening in the aperture plate, wherein the aperture plate is configured to be biased to one potential surrounding the first inner aperture opening and the at least one outer aperture opening.
Public/Granted literature
- US20130270438A1 SWITCHABLE MULTI PERSPECTIVE DETECTOR, OPTICS THEREFOR AND METHOD OF OPERATING THEREOF Public/Granted day:2013-10-17
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