Invention Grant
- Patent Title: FinFET device and method of manufacturing same
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Application No.: US13272305Application Date: 2011-10-13
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Publication No.: US08723236B2Publication Date: 2014-05-13
- Inventor: Chi-Wen Liu , Chao-Hsiung Wang
- Applicant: Chi-Wen Liu , Chao-Hsiung Wang
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L29/772
- IPC: H01L29/772 ; H01L21/336

Abstract:
A semiconductor device and method for fabricating a semiconductor device is disclosed. An exemplary semiconductor device includes a substrate including a fin structure including one or more fins disposed on the substrate. The semiconductor device further includes a dielectric layer disposed on a central portion of the fin structure and traversing each of the one or more fins. The semiconductor device further includes a work function metal disposed on the dielectric layer and traversing each of the one or more fins. The semiconductor device further includes a strained material disposed on the work function metal and interposed between each of the one or more fins. The semiconductor device further includes a signal metal disposed on the work function metal and on the strained material and traversing each of the one or more fins.
Public/Granted literature
- US20130092984A1 FINFET DEVICE AND METHOD OF MANUFACTURING SAME Public/Granted day:2013-04-18
Information query
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