Invention Grant
- Patent Title: Nonvolatile memory device
- Patent Title (中): 非易失性存储器件
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Application No.: US13052531Application Date: 2011-03-21
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Publication No.: US08723245B2Publication Date: 2014-05-13
- Inventor: Hiroshi Akahori , Kiyohito Nishihara , Masaki Kondo , Yingkang Zhang , Shigeo Kondo , Hidenobu Nagashima , Kazuaki Iwasawa , Takashi Ichikawa
- Applicant: Hiroshi Akahori , Kiyohito Nishihara , Masaki Kondo , Yingkang Zhang , Shigeo Kondo , Hidenobu Nagashima , Kazuaki Iwasawa , Takashi Ichikawa
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- Priority: JP2010-154850 20100707
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
According to one embodiment, a nonvolatile memory device includes a substrate, first and second tunnel insulating films, first and second floating gate electrodes, an intergate insulating film and a control gate electrode. The substrate has first and second active regions isolated from each other by an element isolation trench. The first and second tunnel insulating films are located in the first and second active regions, respectively. The first and second floating gate electrodes are located on the first and second tunnel insulating films, respectively. The intergate insulating film includes a first insulating layer of a first insulating material, an electron trap layer of a second insulating material on the first insulating layer, and a second insulating layer of the first insulating material on the electron trap layer. The control gate electrode is located on the intergate insulating film.
Public/Granted literature
- US20120007163A1 NONVOLATILE MEMORY DEVICE Public/Granted day:2012-01-12
Information query
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