Invention Grant
US08723295B2 Semiconductor device, manufacturing method thereof, electronic device and vehicle 有权
半导体装置及其制造方法,电子装置和车辆

Semiconductor device, manufacturing method thereof, electronic device and vehicle
Abstract:
The present invention makes it possible to inhibit an SOA (Safe Operating Area) in a vertical-type bipolar transistor from narrowing. A p-type base layer 150 includes a first peak, a second peak, and a third peak in an impurity profile in the thickness direction. The first peak is located on the topmost surface side of a semiconductor substrate 100. The second peak is located closer to the bottom face side of the semiconductor substrate 100 than the first peak and higher than the first peak. The third peak is located between the first peak and the second peak.
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