Invention Grant
- Patent Title: Sensor with energy-harvesting device
- Patent Title (中): 带有能量收集装置的传感器
-
Application No.: US13047502Application Date: 2011-03-14
-
Publication No.: US08723343B2Publication Date: 2014-05-13
- Inventor: Tien-Kan Chung , Wen-Chuan Tai , Yao-Te Huang , Hsin-Ting Huang , Shang-Ying Tsai , Chang-Yi Yang , Chia-Ming Hung
- Applicant: Tien-Kan Chung , Wen-Chuan Tai , Yao-Te Huang , Hsin-Ting Huang , Shang-Ying Tsai , Chang-Yi Yang , Chia-Ming Hung
- Applicant Address: TW
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW
- Agency: Lowe Hauptman & Ham, LLP
- Main IPC: H02P9/04
- IPC: H02P9/04
Abstract:
In some embodiments of the present disclosure, a sensor comprises a substrate, a sensor element and an energy-harvesting device. The sensor element comprises a plate, and the plate is moveable with respect to the substrate. The energy-harvesting device is formed on the plate of the sensor element.
Public/Granted literature
- US20120235647A1 SENSOR WITH ENERGY-HARVESTING DEVICE Public/Granted day:2012-09-20
Information query
