Invention Grant
- Patent Title: Surface acoustic wave device, electronic apparatus, and sensor apparatus
- Patent Title (中): 声表面波装置,电子仪器和传感器装置
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Application No.: US13223530Application Date: 2011-09-01
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Publication No.: US08723395B2Publication Date: 2014-05-13
- Inventor: Kunihito Yamanaka
- Applicant: Kunihito Yamanaka
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2010-201749 20100909
- Main IPC: H03H9/25
- IPC: H03H9/25

Abstract:
A SAW device has an IDT which is provided on the principal surface of a quartz crystal substrate having Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, 42.79≦|ψ|≦49.57°) and excites a SAW in a stopband upper end mode, and a pair of reflectors which are arranged on both sides of the IDT. Inter-electrode-finger grooves are recessed between the electrode fingers of the IDT, and inter-conductor-strip grooves are recessed between the conductor strips of the reflectors. A first direction (X′ axis) perpendicular to the electrode fingers and the conductor strips intersects the electrical axis (X axis) of the quartz crystal substrate at an angle ψ. At least a part of the IDT and the reflectors are arranged in a second direction intersecting the first direction at an angle α of 1.0°≦α≦2.75°. An excellent frequency-temperature characteristic and a high Q value in an operation temperature range are realized simultaneously.
Public/Granted literature
- US20120062069A1 SURFACE ACOUSTIC WAVE DEVICE, ELECTRONIC APPARATUS, AND SENSOR APPARATUS Public/Granted day:2012-03-15
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