Invention Grant
US08723395B2 Surface acoustic wave device, electronic apparatus, and sensor apparatus 有权
声表面波装置,电子仪器和传感器装置

Surface acoustic wave device, electronic apparatus, and sensor apparatus
Abstract:
A SAW device has an IDT which is provided on the principal surface of a quartz crystal substrate having Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, 42.79≦|ψ|≦49.57°) and excites a SAW in a stopband upper end mode, and a pair of reflectors which are arranged on both sides of the IDT. Inter-electrode-finger grooves are recessed between the electrode fingers of the IDT, and inter-conductor-strip grooves are recessed between the conductor strips of the reflectors. A first direction (X′ axis) perpendicular to the electrode fingers and the conductor strips intersects the electrical axis (X axis) of the quartz crystal substrate at an angle ψ. At least a part of the IDT and the reflectors are arranged in a second direction intersecting the first direction at an angle α of 1.0°≦α≦2.75°. An excellent frequency-temperature characteristic and a high Q value in an operation temperature range are realized simultaneously.
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