Invention Grant
US08723396B2 Surface acoustic wave device, electronic apparatus, and sensor apparatus 有权
声表面波装置,电子仪器和传感器装置

Surface acoustic wave device, electronic apparatus, and sensor apparatus
Abstract:
A SAW device has an IDT which is provided on the principal surface of a quartz crystal sustrate having Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, ψ) and excites a SAW in a stopband upper end mode. Inter-electrode-finger grooves 8 are recessed between the electrode fingers of the IDT. When the Euler angle ψ is 42.79°≦|ψ|≦49.57°, the thickness H of the electrode fingers of the IDT is set to be within 0.055 μm≦H≦0.335 μm, preferably, 0.080 μm≦H≦0.335 μm. When the Euler angle ψ is |ψ|≠90°×n (where n=0, 1, 2, 3), and the thickness H of the electrode fingers is set to 0.05 μm≦H≦0.20 μm.
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