Invention Grant
US08723541B2 Vertical micro contact probe having variable stiffness structure 有权
具有可变刚度结构的垂直微接触探针

Vertical micro contact probe having variable stiffness structure
Abstract:
An exemplary embodiment of the present invention provides a vertical micro contact probe that includes a column formed by longitudinally continuously stacking a plurality of basic units and a front end formed at the front end of the column and contacting an electrode pad of a semiconductor chip. The basic unit includes a probe body alternately bending to the left and right and protrusions protruding from the probe body at the left and right sides from the center of the width direction, and contacting the adjacent probe body to support the probe body under compression.
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