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US08724223B2 Device for homogenizing laser radiation 有权
用于均匀化激光辐射的装置

Device for homogenizing laser radiation
Abstract:
A device for homogenizing laser radiation contains a plurality of mirror elements which are arranged offset with respect to one another and at which the laser radiation to be homogenized can be reflected in such a way that it is split into a plurality of partial beams corresponding to the number of mirror elements. The partial beams have a path difference with respect to one another as a result of the reflection. The device further has a plurality of lens elements, each of which is respectively assigned to one of the mirror elements in such a way that a respective one of the partial beams can pass through one of the lens elements. A distance between each of the mirror elements and the lens elements assigned thereto is equal to the focal length of the respective lens element.
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