Invention Grant
- Patent Title: Recognition of template patterns with mask information
- Patent Title (中): 用掩模信息识别模板模式
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Application No.: US13303374Application Date: 2011-11-23
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Publication No.: US08726200B2Publication Date: 2014-05-13
- Inventor: Chung-Min Fu , Yung-Fong Lu , Wen-Ju Yang , Chin-Chang Hsu
- Applicant: Chung-Min Fu , Yung-Fong Lu , Wen-Ju Yang , Chin-Chang Hsu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Agent Steven E. Koffs
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
Apparatus includes a machine readable storage medium for storing a template library having at least one template. The template is to include a first layout representation of at least one pattern to be formed by multi-patterning a single layer of an IC. The pattern has a plurality of portions to be formed using a plurality of respectively different photomasks. The first layout representation includes data identifying on which photomask each portion is to be located. An electronic design automation (EDA) tool includes a processor configured to receive a hardware description language representation of at least a part of a circuit and generate a second layout representation of the part of the circuit having a plurality of polygons. The EDA tool has a matching module that identifies and outputs an indication of whether one or more of the plurality of portions matches a subset of the plurality of polygons.
Public/Granted literature
- US20130132913A1 RECOGNITION OF TEMPLATE PATTERNS WITH MASK INFORMATION Public/Granted day:2013-05-23
Information query