Invention Grant
- Patent Title: Adjusting a MEMS gyroscope to reduce thermally varying bias
- Patent Title (中): 调整MEMS陀螺仪以减少热变化偏差
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Application No.: US13316083Application Date: 2011-12-09
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Publication No.: US08726717B2Publication Date: 2014-05-20
- Inventor: Ryan Supino , Howard B. French
- Applicant: Ryan Supino , Howard B. French
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Agency: Fogg & Powers LLC
- Main IPC: G01P21/00
- IPC: G01P21/00
Abstract:
A method for calibrating a micro-electro-mechanical system (MEMS) vibrating structure gyroscope is provided. The method includes obtaining an indication of a position of at least one proof mass with respect to at least one drive electrode and applying an electrostatic force to the at least one proof mass as a function of the indication, the electrostatic force configured to position the at least one proof mass in a first position with respect to at least one drive electrode.
Public/Granted literature
- US20120272711A1 ADJUSTING A MEMS GYROSCOPE TO REDUCE THERMALLY VARYING BIAS Public/Granted day:2012-11-01
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