Invention Grant
- Patent Title: Micromechanical structures
- Patent Title (中): 微机械结构
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Application No.: US12683316Application Date: 2010-01-06
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Publication No.: US08726731B2Publication Date: 2014-05-20
- Inventor: Johannes Classen , Christoph Gauger
- Applicant: Johannes Classen , Christoph Gauger
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102009000606 20090204
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
A micromechanical structure including a substrate having a main plane of extension, and including a first seismic mass, the first seismic mass including a grid structure made of intersecting first mass lines and the first seismic mass being flexibly secured with the aid of first bending-spring elements, and moreover, a first line width of the first mass lines parallel to the main plane of extension being between 20 and 50 percent of a further first line width of the first bending-spring elements parallel to the main plane of extension.
Public/Granted literature
- US20100192690A1 MICROMECHANICAL STRUCTURES Public/Granted day:2010-08-05
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