Invention Grant
- Patent Title: Devices, systems, and methods for carbonation of deionized water
- Patent Title (中): 用于去离子水碳酸化的装置，系统和方法
-
Application No.: US13871626Application Date: 2013-04-26
-
Publication No.: US08727323B2Publication Date: 2014-05-20
- Inventor: Johannes Seiwart , Ulrich Brammer , Christiane Gottschalk , Joachim Lohr
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Proskauer Rose LLP
- Main IPC: B01F3/04
- IPC: B01F3/04
Abstract:
Devices, systems, and methods employed in wet cleaning semiconductor devices are provided. In particular, systems that can deliver deionized water with the desired concentration of CO2 and methods of generating deionized water with a desired concentration of CO2 for use in wet cleaning of semiconductor devices are provided.
Public/Granted literature
- US20130313728A1 Devices, Systems, and Methods for Carbonation of Deionized Water Public/Granted day:2013-11-28
Information query
