Invention Grant
- Patent Title: Pot-shaped copper sputtering target and manufacturing method thereof
- Patent Title (中): 锅形铜溅射靶及其制造方法
-
Application No.: US11909471Application Date: 2006-02-08
-
Publication No.: US08728255B2Publication Date: 2014-05-20
- Inventor: Atsushi Fukushima , Shiro Tsukamoto
- Applicant: Atsushi Fukushima , Shiro Tsukamoto
- Applicant Address: JP Tokyo
- Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee: JX Nippon Mining & Metals Corporation
- Current Assignee Address: JP Tokyo
- Agency: Howson & Howson LLP
- Priority: JP2005-090609 20050328
- International Application: PCT/JP2006/302122 WO 20060208
- International Announcement: WO2006/103833 WO 20061005
- Main IPC: C23C14/34
- IPC: C23C14/34

Abstract:
Provided is a pot-shaped copper sputtering target manufactured with die forging, wherein the Vickers hardness Hv at all locations of the inner surface of the pot-shaped target is 70 or greater. With this pot-shaped copper sputtering target, the average crystal grain size in the target structure is 65 μm or less. Further, the inner surface of the pot-shaped target comprises crystalline orientations of (220), (111), (200), (311) obtained by X-ray diffraction, and the crystalline orientation of the face subject to erosion of the pot-shaped target is of a (220) primary orientation. An object of the present invention is to obtain a manufacturing method of a high quality sputtering target by improving and devising the forging process and heat treatment process to make the crystal grain size refined and uniform, and to obtain a high-quality sputtering target.
Public/Granted literature
- US20090057139A1 Pot-Shaped Copper Sputtering Target and Manufacturing Method Thereof Public/Granted day:2009-03-05
Information query
IPC分类: