Invention Grant
US08728380B2 Lithographic method for forming a pattern 有权
用于形成图案的平版印刷方法

Lithographic method for forming a pattern
Abstract:
A lithographic method for forming a pattern within a surface on a substrate includes providing a substrate with a degradable material, molding the material to imprint a pattern thereon, depositing a layer of a second material over the imprinted pattern, removing portions of the layer of the second material to expose portions of the imprinted pattern of degradable material and removing portions of the exposed degradable material to leave an open pattern in the layer of second material.
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