Invention Grant
- Patent Title: Lithographic method for forming a pattern
- Patent Title (中): 用于形成图案的平版印刷方法
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Application No.: US11932924Application Date: 2007-10-31
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Publication No.: US08728380B2Publication Date: 2014-05-20
- Inventor: Stephen Y. Chou
- Applicant: Stephen Y. Chou
- Applicant Address: US MN Minneapolis
- Assignee: Regents of the University of Minnesota
- Current Assignee: Regents of the University of Minnesota
- Current Assignee Address: US MN Minneapolis
- Agency: Polster Lieder
- Main IPC: B29C59/02
- IPC: B29C59/02

Abstract:
A lithographic method for forming a pattern within a surface on a substrate includes providing a substrate with a degradable material, molding the material to imprint a pattern thereon, depositing a layer of a second material over the imprinted pattern, removing portions of the layer of the second material to expose portions of the imprinted pattern of degradable material and removing portions of the exposed degradable material to leave an open pattern in the layer of second material.
Public/Granted literature
- US20080143019A1 RELEASE SURFACES, PARTICULARLY FOR USE IN NANOIMPRINT LITHOGRAPHY Public/Granted day:2008-06-19
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