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US08728574B2 Methods for introducing a first gas and a second gas into a reaction chamber 有权
将第一气体和第二气体引入反应室的方法

Methods for introducing a first gas and a second gas into a reaction chamber
Abstract:
Gas distribution units of fluidized bed reactors are configured to direct thermally decomposable compounds to the center portion of the reactor and away from the reactor wall to prevent deposition of material on the reactor wall and process for producing polycrystalline silicon product in a reactor that reduce the amount of silicon which deposits on the reactor wall.
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