Invention Grant
US08728621B2 Hard multilayer film formed body and method for manufacturing same 有权
硬质多层膜成型体及其制造方法

Hard multilayer film formed body and method for manufacturing same
Abstract:
The present invention provides a hard multilayer film formed body which has an intermediate layer excellent in its adhesion to a base material and a DLC film which is a surface layer excellent in its wear resistance, prevents peeling from occurring between the DLC film and the intermediate layer, and is excellent in its wear resistance and a method for producing the same. A hard multilayer film formed body 1 consists of a multilayer film formed on a surface of a base material 2 consisting of a cemented carbide material or a ferrous material. The multilayer film has (1) a film, composed mainly of DLC, which is formed as a surface layer 5 of the multilayer film; (2) an intermediate layer 3, composed mainly of a metallic material, which is formed between the surface layer 5 and the base material 2; and (3) a stress relaxation layer 4, composed mainly of carbon, which is formed between the intermediate layer 3 and the surface layer 5. The stress relaxation layer 4 is a graded layer whose hardness increases continuously or stepwise from a side of the intermediate layer 3 toward a side of the surface layer 5.
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