Invention Grant
- Patent Title: Solid-state imaging device, production method thereof, and electronic device
- Patent Title (中): 固态成像装置及其制造方法以及电子装置
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Application No.: US13178624Application Date: 2011-07-08
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Publication No.: US08728852B2Publication Date: 2014-05-20
- Inventor: Keiji Tatani , Takuji Matsumoto , Yasushi Tateshita , Fumihiko Koga , Takashi Nagano , Takahiro Toyoshima , Tetsuji Yamaguchi , Keiichi Nakazawa , Naoyuki Miyashita , Yoshihiko Nagahama
- Applicant: Keiji Tatani , Takuji Matsumoto , Yasushi Tateshita , Fumihiko Koga , Takashi Nagano , Takahiro Toyoshima , Tetsuji Yamaguchi , Keiichi Nakazawa , Naoyuki Miyashita , Yoshihiko Nagahama
- Applicant Address: JP
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP
- Agency: Sheridan Ross P.C.
- Priority: JP2008-101971 20080409; JP2008-199050 20080731; JP2008-201117 20080804
- Main IPC: H01L31/02
- IPC: H01L31/02

Abstract:
A solid-state imaging device which includes a pixel section, a peripheral circuit section, a first isolation region formed with a STI structure on a semiconductor substrate in the peripheral circuit section, and a second isolation region formed with the STI structure on the semiconductor substrate in the pixel section. The portion of the second isolation region buried into the semiconductor substrate is shallower than the portion buried into the semiconductor substrate of the first isolation region, and the height of the upper face of the second isolation region is equal to that of the first isolation region. A method of producing the solid-state imaging device and an electronic device provided with the solid-state imaging devices are also disclosed.
Public/Granted literature
- US20110269259A1 SOLID-STATE IMAGING DEVICE, PRODUCTION METHOD THEREOF, AND ELECTRONIC DEVICE Public/Granted day:2011-11-03
Information query
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