Invention Grant
- Patent Title: Small footprint phase change memory cell
- Patent Title (中): 小尺寸相变存储单元
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Application No.: US12855079Application Date: 2010-08-12
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Publication No.: US08728859B2Publication Date: 2014-05-20
- Inventor: Matthew J. Breitwisch , Eric A. Joseph , Chung H. Lam , Hsiang-Lan Lung
- Applicant: Matthew J. Breitwisch , Eric A. Joseph , Chung H. Lam , Hsiang-Lan Lung
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Ido Tuchman; Vazken Alexanian
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L45/00

Abstract:
An example embodiment disclosed is a method for fabricating a phase change memory cell. The method includes forming a non-sublithographic via within an insulating substrate. The insulating substrate is embedded on the same layer as a first metalization layer (Metal 1) of a semiconductor wafer, and includes a bottom and a sidewall. A sublithographic aperture is formed through the bottom of the non-sublithographic via and extends to a buried conductive material. The sublithographic aperture is filled with a conductive non-phase change material. Furthermore, phase change material is deposited within the non-sublithographic via.
Public/Granted literature
- US20120037877A1 ONE-MASK PHASE CHANGE MEMORY PROCESS INTEGRATION Public/Granted day:2012-02-16
Information query
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