The invention prevents a conductive fuse blown out by laser trimming from reconnecting by a plating electrode in a plating process and prevents a plating solution etc from entering a fuse blowout portion. On a semiconductor substrate of a multilayered wiring structure including a fuse blowout groove formed by blowing out a conductive fuse by laser trimming in a trimming element forming region, a second protection layer is formed so as to cover the trimming element forming region and then a plating electrode is formed on an draw-out pad electrode made of a topmost metal wiring. A third protection layer is then formed so as to cover the semiconductor substrate including the second protection layer and have an opening on the plating electrode.