Invention Grant
- Patent Title: Contact structure and manufacturing method thereof
- Patent Title (中): 接触结构及其制造方法
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Application No.: US13803354Application Date: 2013-03-14
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Publication No.: US08728889B2Publication Date: 2014-05-20
- Inventor: Ho-Ki Lee , Gwang-Hyun Baek , Du-Chul Oh , Jin-Kwan Lee , Ki-Jeong Kim
- Applicant: Ho-Ki Lee , Gwang-Hyun Baek , Du-Chul Oh , Jin-Kwan Lee , Ki-Jeong Kim
- Applicant Address: KR Suwon-Si, Gyeonggi-Do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si, Gyeonggi-Do
- Agency: F.Chau & Associates, LLC
- Priority: KR10-2012-0038631 20120413
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A semiconductor memory device includes conductive patterns vertically stacked on the substrate and having pad regions extended further at edge portions of the conductive patterns as the conductive patterns descend from an uppermost conductive pattern to a lowermost conductive pattern, a first contact plug disposed on a first pad region of the lowermost conductive pattern, a buffer conductive pattern disposed on a second pad region positioned above the first pad region, and a second contact plug formed on the buffer conductive pattern.
Public/Granted literature
- US20130270714A1 CONTACT STRUCTURE AND MANUFACTURING METHOD THEREOF Public/Granted day:2013-10-17
Information query
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